Magnetron sputtering

Magnetron sputtering

  • Skraćeni naziv instrumenta

    Magnetron sputtering

    Inventarni broj

    University of Split, Inv. No.2748

    Opći opis

    The device model is Classic 250, while the manufacturer is Pfeiffer Vacuum, Germany. The device has a single 3 inch diameter target connected to an 1 kW dc-voltage source. Such configuration allows metals' sputtering on a substrate of up to 5 inch in diameter.

    Uža područja primjene

    solid-state physics, biophysics, chemistry, electronics

    Namjena instrumenta

    formation of thin metallic films with a thickness of several tens of nanometers to several micrometers

    Popis usluga

    formation of thin metallic films

    Tijelo koje je financiralo nabavku opreme

    ,

    Project title

    Strengthening the Capacities for Application and Technology Transfer of Microelectromehanical Systems at the University of Split (MEMSplit)

    Ključne riječi

    dc magnetron sputtering, thin films

    Procijenjeni broj korisnika

    10

    Year of manufacture

    2015

  • Ustanova en

    Sveučilište u Splitu, Prirodoslovno-matematički fakultet
    Ruđera Boškovića 33, Split

  • Način korištenja instrumenta

    ,

    Upute za korisnike

    substrate diameter up to 5 inches

    Broj istovrsnih instrumenata u ustanovi

    1

  • Ime i prezime

    Ante Bilusic

    Titula

    Prof

    E-mail

    bilusic@pmfst.hr

    Telefon

    +385 21 619 295

    Faks

    +385 21 619 227

    Mobitel

    +385 98 511 370

  • Model

    Pfeiffer Classic 250

    Mrežna (URL) adresa instrumenta na stranicama proizvođača

    https://www.pfeiffer-vacuum.com/filepool/File/Literature/PA0034PEN-Coating-Systems.pdf;jsessionid=17A6F6BCFB2CD2B04E520284ECDC05A6-n2?referer=2039&request_locale=en_US

    Princip rada i mjerna tehnika

    Application of thin metallic films by magnetron sputtering

    Radno i mjerno područje

    film thicknesses of several tens of nanometers to several micrometers

    Proizvođač

    Pfeiifer Vacuum

    Mrežna (URL) adresa proizvođača

    https://www.pfeiffer-vacuum.com/en/

    Purchase price

    755200

    Estimated current value of equipment

    700000

    Vijek trajanja

    at least 15 years

  • Slike en
    Pfeiffer Classic 250
    Pfeiffer Classic 250
    Pfeiffer Classic 250 (control computer and dc-source)
    Pfeiffer Classic 250 (control computer and dc-source)

Natrag en